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What does a wafer prober do?
A wafer prober is a device used in industry and academic research to establish electrical contacts with circuits and structures on semiconductor wafers or other substrates.
Typically, it comprises a chuck for holding and positioning the wafer, micro manipulators or automatic positioning units, optical systems for alignment, temperature control and shielding, as well as software for wafer navigation and measurement automation.
These probe stations are available with varying configurations. In general, the following features can be distinguished:
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Degree of automation (manual, semi-automatic or fully automatic operation)
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Specialised equipment for, for example, RF measurements or for measuring very small or very large voltages and currents
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Universal accessories for adapting to specific measurement tasks
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Use in RF, millimetre-wave and terahertz measurements
Degree of automation in wafer test systems
Manual wafer probers
Simple measurement tasks on a small number of DUTs or applications in training and education do not normally require automation. A wide range of manual wafer probers is available for such applications – from low-cost entry-level models to high-end manual machines.
Wafer probers – semi-automatic
If a larger number of samples are to be tested automatically and without constant supervision, semi-automatic probe stations are usually employed. Here, the semiconductor wafer or substrate to be tested is loaded manually into the prober at the start of a measurement. All subsequent steps are then carried out automatically under the control of a central computer.
Wafer probers – fully automatic
For the evaluation of measurements on large numbers of DUTs (such as entire batches or lots), fully automatic wafer probers are available. Here, an entire batch of wafers, stored in special cassettes, is tested. The retrieval and positioning of a wafer on the chuck, as well as its return to the cassette, takes place automatically. Due to their speed, these automated probe stations are also suitable for production applications.
Scalable semi-automatic systems
Semi-automatic wafer probers provide an important bridge, as they can be upgraded to fully automatic systems. With such systems, users can be confident that their investment is safeguarded even as production volumes increase.
Customised configuration of your wafer test system
Whether you are looking for an entry-level model or a highly specialised custom solution, we can provide you with the right solution. The optimal configuration of a wafer prober depends on the specific measurements you intend to carry out. We look forward to discussing all relevant factors with you during a consultation.
Solutions for characterising wafers under specialised conditions
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Testing in high vacuum and/or at very low temperatures
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Applications in fundamental research
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Complete system
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We look forward to discussing your individual requirements in person.
We look forward to hearing from you.
Your bsw TestSystems & Consulting Sales Team
